[Measurement & Analysis]Field Emission Scanning Electron Microscope
? Electron Optics
-Electron column : TriglavTM
-Electron Gun : High brightness Schottky emitter
-Resolution : 0.6 nm at 15 keV (In Beam SE), 0.9 nm at 1 keV (BD mode)
-Probe Current : < 2 pA to 400 nA
-Electron Beam Energy : 50 eV to 30 keV
? Chamber
-Dimensions : Internal dimensions: 340 mm (width) x 315 mm (depth),
-Door: 340 mm (width) x 320 mm (height)
-Chamber Vacuum: High vacuum : < 9 ×10-3 Pa
-SEM Gun Vacuum: < 3 x 10-7 Pa
-pumping time after specimen exchange typically < 3,5 minutes
-Stage Movements : X = 130 mm (- 65 mm to + 65 mm), Y = 130 mm (- 65 mm to + 65 mm), Z = 90 mm, Tilt = ?60° to +90°, Rotation : 360°
? Detectors Specifications
-SE Detector : Everhart-Thornley type
-In-Beam SE detector : Located in the SEM column
-Mid-Angle BSE detector : Second in-column detector
-LE-BSE detector mot. : scintillator type
-In-Beam f-BSE : scintillator-based back-scattered electron detector mounted in-column
-Beam Deceleration Technology(BDT) mode : Energy range is extended down to 50 eV
? Energy Dispersive X-ray Spectrometer
-NEW Bruker Energy Dispersive X- ray Spectrometer QUANTAX 200
-LN2-free high-speed Detector XFlash® 6
? Lithography System
-Elphy Quantum lithography system compatibility