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Alpha-Step (Step Height Measurement)
작성자 jnsinc 등록일 21-01-20 15:44 조회 568
제작사 Kla-tencor 모델명 Alpha-Step IQ 도입연도 2004-12
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? Scanning stylus (standard): 5-micron radius tip, 60° angled stylus
? Stylus force : 15 mg (nominal setting)
? Profile length (max) : 10 mm in the right direction, 2 mm in the left direction
? Maximum step height : 2 mm (for stepping down conditions only)
? Scan Length : 10 mm
? Scan Speed : 2 μm/s to 200 μm/s
? Sampling Rate : 50, 100, 200, 500 or 1000 Hz
? Vertical Range : ± 10μm (20μm) at 0.012? vertical resolution, ± 200μm (400μm) at 0.24 ? vertical resolution, ± 1000μm (2000μm) at 1.2 ? vertical resolution
? Horizontal Resolution : 0.01 μm (100 ?) at 2 μm/s scan speed
? Range : 1.0 ? 99.9mg
? Resolution : 0.1mg (~ 0.5mg standard deviation)
? Maximum sample size : 158 mm diameter
? Maximum sample thickness : 21 mm
? Maximum sample weight : 1 kg
? Throat depth : 81mm
? X/Y maximum travel : 151mm x 80mm
첨부파일 A step.jpg
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