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4-Point Probe System
작성자 jnsinc 등록일 21-01-20 15:44 조회 635
제작사 에이아이티 모델명 CMTSR1000N Sheet Resistance/Resistivity Measurement System 도입연도 2006-01
용도 면저항 측정

? Sheet resistance measurement   
- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
- Measuring point : Center 1 point
? Resistivity measurement   
- Measuring method : Contacted by 4-point probe (Input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm (VLSI standard wafer)
- Measuring point : Center 1 point
? Current source   
- 10nA to 100mA
- DVM 0V to 2,000mV
 ? Measurement accuracy   
- ±0.5 % (Precision resistor)   
? JANDEL 4-point probe   
- Pin spacing : 20 mils ∼ 50 mils
- Pin load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron
첨부파일 4PP.jpg
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