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Wafer Scriber
작성자 관리자 등록일 21-03-25 16:54 조회 444
제작사 Tecdia 모델명 TEC-2004TM 도입연도 2007-04-23
용도 사파이어 기판 사용

특징
Quarter 2 4 Porous Vaccum Microscope x0.8 ~ x5zoom Air Pulse 하중인가방식
1) Wafer table
- Size: Diameter 110mm (Porous Vacuum 100mm)
- Parallelism: ±10μm/100m
2) X-axis (Direction of pitch sending)
- Driving Method: Pulse motor & Lead screw
- Stroke: 0~100mm
- Resolution: 0.1μm
3) Y-axis (Work direction)
- Driving Method: AC Motor & Crankshaft
- Stroke: 25~110mm (Fixation within this range)
- Speed: 0~100mm/sec
4) Z-axis
- Driving Method: Pulse motor & Lead screw
- Stroke: 0~15mm
- Resolution: 1μm
5) θ -axis
- Driving Method: AC Motor & Timing Belt
- Operation Range: ±360°
- Resolution: 0.1°
6) Load axis
- Driving Method: Electrical Air Regulator & Air Cylinder
- Operation Range: 0~200g
- Resolution: Appro x 1g
7) Camera axis
- Driving Method: Pulse Motor & Ball Screw
- Operation Range: 0~99mm
8) Manual setting
- X-axis (Feeding Direction): Fine Adjustment
- Scribing Angle: ±3°
첨부파일 Image13.jpg
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