[Measurement & Analysis]Electrochemical CV Profiler
? Carrier Concentration : 10E13 ~ 10E-3cm-3
? Type : n- and p- type
? Material : GaN, GaAs, InP, Si
? Sealing ring size
- the large ring : 3.5mm diameter (normally 0.1cm2)
- the small ring : 1mm diameter (normally 0.01cm2)
? Desiding on ring size
- the large ring : At higher carrier concentration (above 5E18cm-3)
- the small ring : carrier concentration (1E13 to 1E20cm-3)